SEMICONDUCTOR
Semiconductor
Semiconductor equipment parts

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GT TECH machines the mechanical components inside semiconductor production equipment: vacuum chamber bodies, base plates, flanges and fixture assemblies. This is the most demanding group we serve, because the parts must hold their dimensions while working under vacuum and through continuous temperature cycling.
Technical requirements
Mating surfaces must be flat and clean so the assembly seals correctly under vacuum. Threaded holes and locating faces must match the drawing exactly so components stay interchangeable between production batches. We control dimensions at each stage and keep inspection records for every delivered batch.
Typical components
- Vacuum chamber bodies
- Machined from solid aluminium with seal grooves and flanges at both ends.
- Base and fixture plates
- Locating plates with multiple threaded holes for internal mechanisms.
- Flanges and joints
- Connecting parts between chambers, requiring high surface flatness.
- Guide components
- Slides, supports and locating parts for moving mechanisms.




